• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Samples support device in vacuum environments, comprising a sample support element (8) associable to a device (2) for manipulating said support element (8), a threaded shaft (1) that can be fixed to the device (2) handling; a base element (10) fixed with rotatability to the threaded shaft; a threaded nut element (4) on the threaded shaft; a connection element (5, 6) associated with the nut element (4) and associated with the support element (8), the support element (8) being articulated to said connection element (5, 6) by means of a first articulation (9) and being articulated to said base element (10) by means of a second articulation (11); and support means (12) comprising a support surface (14) for a part (5) of the group formed by the nut element (4), the connection means (5, 6), the element (10) of base and the support element (8). (Machine-translation by Google Translate, not legally binding)
    公开号:ES2593879A1
    申请号:ES201631349
    申请日:2016-10-19
    公开日:2016-12-13
    发明作者:Alejandro CRISOL ARIÑO
    申请人:Consorci per a la Construccio Equipament i Explotacio del Laboratori de Llum Sincrotro；
    IPC主号:
    专利说明:

    Title.
    5 Sample support device in vacuum environments. Object of the invention.
    The present invention relates to a sample support device in vacuum environments 10. Background of the invention.
    In laboratories where you work in vacuum environments (high vacuum or ultra high
    15 vacuum) and with radiation beams (X-rays, neutrons, electrons) for the analysis of samples (for example, arranged in STM plates) by means of the incidence of said radiation beams on them, it is very common to manipulate the samples directly inside from the vacuum environment. This involves the use of a complex system of sample transfer devices to collect samples from a
    20 supply device and to arrange them in the desired location for the purpose of analyzing them.
    The sample delivery device comprises an elongated rod-shaped manipulator fixedly attached at one end to a sample holder. The manipulator allows the sample holder with the samples to be introduced into a vacuum chamber by manipulating said holder from the outside. The sample holder passes through a sealed opening present in the chamber wall. This opening does not allow the manipulator to move in a different direction than its longitudinal axis. Therefore, once the sample holder has been
    30 inserted into the vacuum chamber, it is not possible to modify its orientation with respect to said longitudinal axis.
    This limitation makes it necessary to use the aforementioned transfer devices inside the vacuum chamber to change the orientation of the 35 samples when said samples must be arranged in their location of


    analysis in an orientation other than the orientation presented in the support.
    The use of these transfer devices inside the vacuum chamber is inconvenient. First, the space available inside the chamber is reduced. On the other hand, the mechanisms that operate in a vacuum environment must meet a series of requirements that make their use possible in these types of environments, which considerably increases their cost compared to conventional analogue mechanisms. Finally, the fact of having to transfer the samples from the sample holder to their analysis location using one or more
    10 additional transfer devices increase the chances that the samples will fall or suffer some damage during the transfer process.
    Therefore, it would be desirable to have a sample support device that allows varying the orientation of the samples after they are introduced into the chamber of
    15 vacuum, so that the intervention of a transfer device is not necessary to change its orientation or so that it is possible to reduce the number of transfer devices present inside the vacuum chamber.
    20 In the state of the art there are sample support devices that allow the orientation of the sample support with respect to the manipulator. These devices only allow the orientation of the sample holder at predefined angles, for example, 30 or 45 degrees with respect to the longitudinal axis of the manipulator. Also, the mentioned devices require the use of manipulators
    25 complexes with double shafts, which increases its manufacturing difficulty and its price. Description of the invention
    The objective of the present invention is to solve the drawbacks presented by the
    30 devices known in the art, providing a sample support device in vacuum environments comprising a sample support element associable with a manipulation device of said sample support element, characterized in that it further comprises an axis threaded including means for fixing to the manipulation device at one end; a
    35 base element fixed to the opposite end of the threaded shaft so that the threaded shaft can rotate freely around its longitudinal axis with respect to


    said base element; a nut element screwed on the threaded shaft and movable along it by screwing; a connection element associated to the nut element and associated to the sample support element, the sample support element being articulated to said connection element by means of a first joint and said base element being articulated by a second joint, being the articulation axes of the first and second joints parallel to each other and perpendicular to the longitudinal axis of the threaded shaft; and support means that can be fixed to an external support and that comprise a support surface for a part of the
    10 group formed by the nut element, the connection means, the base element and the sample support element.
    Preferably, the connecting element comprises a first bar fixedly connected at one end to the nut element and a second bar articulated by
    15 one end to the other end of the first bar and articulated at its other end to the sample support element through the first joint, the articulation axes of the joint being between the first and second bars and the first joint parallel each.
    Advantageously, the support means comprise a part that includes fixing means to an external support and an opening therethrough for the passage of the sample support element, said opening comprising a support surface for the first bar with a complementary form with respect to the outer contour of a part of said first bar.
    Also advantageously, the sample support element comprises a plurality of modular compartments for corresponding samples.
    The device of the present invention allows to guide the support element of
    30 samples in the desired direction with respect to the longitudinal axis of the manipulator in a simple and economical way. The threaded shaft of the device can be fixed to the manipulator by one of its ends, being aligned with the manipulator to rotate in solidarity with it. The rotation of the manipulator causes the rotation of the threaded shaft around its longitudinal axis. The rotation of the threaded shaft causes the
    35 linear displacement of the nut element, which does not rotate together with the threaded shaft thanks to the connecting element associated with said element of


    nut is supported by the means of support. The connecting element transmits the movement of the nut element to the sample support element through the first joint, and the sample support element rotates around the second joint, perpendicularly with respect to the axis
    5 longitudinal threaded shaft (and manipulator).
    The angle of rotation of the sample support element and the direction of rotation thereof will depend on the angle that the manipulator and the threaded shaft are rotated and the direction of rotation at which they are rotated.
    Therefore, the device of the present invention makes it possible to obtain a simple and economical way to modify the orientation of the samples contained in a sample support element located in a vacuum environment. It is simply necessary to rotate the manipulator associated with the sample support element
    15 around its longitudinal axis in one direction or another a certain angle to modify the orientation of said sample support element as desired. The device has a very simple structure and its operation is also simple, allowing the samples to be arranged in any desired orientation, without any predetermined limit or angular position. Brief description of the drawings.
    In order to facilitate the description of what has been stated above, some drawings are attached in which, schematically and only by way of example,
    In a limitation, a practical case of carrying out the sample support device in vacuum environments of the invention, in which:
    - Figure 1 is a general perspective view of part of the device of the present invention;
    30-Figures 2a and 2b are two top plan views of part of the device shown in Figure 1a in two different positions;
    - Figures 3a, 3b and 3c are an extreme side view, a rear view and a view.
    35 in perspective, respectively, of the device of the invention with the support means;


    -Figure 4 is a top plan view of the device shown in Figures 3a,3b and 3c with the support means represented in section;-Figure 5 is a general schematic view in which thedevice of the present invention mounted in an analysis facility of
    5 samples in a vacuum environment and associated with a manipulator. Description of a preferred embodiment.
    Figures 1, 2a and 2b generally show part of the device for
    10 the present invention. The device of the present invention comprises a threaded shaft 1 with a thread on its outer surface that includes a first end 1a and a second end 1b. The threaded shaft 1 can be joined by the first end 1a to one end of a manipulator 2 (shown only in Figure 5), which basically consists of an elongate rod-shaped element extending a
    15 determined length.
    When joined, the central longitudinal axis X of the threaded axis 1 and the central longitudinal axis of the manipulator 2 will coincide (see again figure 5). The threaded shaft 1 may be attached to the manipulator 2 in any known manner to rotate 20 in solidarity with it around the X axis and to fix its position along the X axis with respect to said manipulator 2. In this case, the first end 1a It consists of a threaded shaft with a smaller diameter than the rest of the threaded shaft 1 and which is screwed into an axial hole present at the corresponding end of the manipulator 2 (Figure 5). A nut 3 is used to ensure that
    25 the threaded shaft 1 does not rotate with respect to the manipulator 2 around the X axis in any direction.
    Thus, the rotation of the manipulator 2 around its longitudinal central axis in one direction or another will cause the threaded axis 1 to rotate around its longitudinal central axis 30 correspondingly.
    The device also comprises a nut element 4 screwed onto the threaded shaft 1. The nut element 4 is fixed to a first bar 5 that extends from the nut element 4 in the direction of the X axis and away from
    35 to the first end 1a of the threaded shaft 1. The first rod 5 and the nut element 4 have the same outer profile in the area in which they are attached.


    The first bar 5 is articulated by its free end to one of the ends of a second bar 6 by means of a joint 7 with an articulation axis that is perpendicular with respect to the X axis. The second bar 6 is articulated by its other
    5 end to the distal end of a sample holder 8 by another joint 9 with a joint axis that is perpendicular to the X axis and parallel to the joint axis of the joint 7.
    The sample holder 8 is articulated by its proximal end or opposite to the
    10 distal end to a base element 10 by another joint 11 which also has a parallel joint axis with respect to the joint axes of the joint 7 and the joint 9. The sample holder 8 may comprise a plurality of modules 8a adjacent adapted to contain S supports for samples of any desired format (in the embodiment shown, plates for
    15 samples of type STM). The number of modules 8a may vary according to needs and, although in the embodiment shown the support 8 comprises eight modules 8a, it would be possible to have a greater or lesser number of modules 8a.
    The base element 10 is connected to the second end 1b of the threaded shaft 1 so
    20 that the threaded shaft 1 can freely rotate about the X axis with respect to said base element 10 but its position along the longitudinal axis X with respect to the base element 10 is fixed. This fixation is obtained in a manner known in the art, by using a bearing disposed between both elements inside a housing of the base element 10 and which exerts the function of stopper or
    25 axial seal.
    It should be noted that the nut element 4, the two bars 5, 6, the base element 10 and the sample holder 8 form a group in which said elements behave like a solidary body when they are applied a torque around a
    30 axis parallel to the X axis. Joints 7, 9 and 11 also act as means of fixing the relative position around an axis parallel to the X axis between the corresponding elements, allowing only the relative rotation of said components around a perpendicular axis. with respect to said X axis.
    35 In this way, the threaded shaft 1 rotates in solidarity with the manipulator 2 around the X axis when attached thereto and can rotate independently with respect to


    to the rest of the device elements 1.
    Referring to Figures 3a to 3c, the device of the present invention also comprises support means that are necessary for its operation. The support means comprise an annular part 12 that can be fixed to an external support (normally, to the body or to a wall of an analysis device in vacuum environments, such as a synchrotron, see figure 5) and comprising an opening 13 in its central part through which the group formed by the nut element 4, the two bars 5, 6, the element 10 can pass
    10 base and the sample holder 8, as well as the threaded shaft 1, said opening 13 comprising a support surface 14 consisting of a cavity in the opening 13 having a complementary shape with respect to the outer contour (cross section) of the first bar 5.
    15 The opening 13 is designed to allow the passage of the nut element 4, the two bars 5, 6, the base element 10, the sample holder 8 and the threaded shaft 1 therethrough by a movement of said components parallel to the axis
    X. The plane in which the opening 13 is comprised is perpendicular with respect to said X axis. During part of this movement, part of the first bar 5 is housed in the support surface 14 (see figures 3a and 3c), so that the first bar 5 can move parallel to the X axis along said support surface 14, similar to a key and a lock hole. However, when the first bar 5 is housed in the bearing surface 14, the movement of the nut element 4, the two bars 5, 6, the base element 10 and the sample holder 8 25 about an axis parallel to the X axis is impossible, since the walls of the support surface 14 contact the outer walls of the first bar 5. In this way, the support surface 14 of the opening 13 of the annular piece 12 prevents the group formed by the nut element 4, the two bars 5, 6, the base element 10 and the sample holder 8 can rotate about an axis
    30 parallel to the X axis, since all these elements behave like a solidary body when a torque is applied around said axis, as explained above.
    The operation of the device herein will be explained below.
    Invention. Referring specifically to Figures 2a and 2b, it can be seen that the sample holder 8 is arranged forming a


    different angle with respect to the X axis. In Figure 2a the support 8 is aligned longitudinally with respect to the X axis, while in Figure 2b the support 8 forms an angle of approximately 30 degrees with respect to said X axis.
    5 To obtain the position shown in Figure 2b from the position shown inFigure 2a, the manipulator 2 is rotated about its longitudinal axis X, ofso that threaded shaft 1 will also rotate around the same X axis and in the samedirection (see arrows). This operation will be performed with the device arranged in aposition as shown in figures 3a to 3c and 4, that is, with the first bar 5
    10 disposed within the support surface 14 of the opening 13.
    The rotation of the threaded shaft 1 around the X axis will cause the nut element 4 to move along the X axis, since the nut element 4 will not rotate around the X axis, prevented by the walls of the supporting surface 14 in contact with
    15 walls of the first bar 5 attached to the nut element 4. The displacement of the nut element 4 in one direction or another along the X axis will depend on the direction of rotation of the threaded shaft 1.
    The displacement of the nut element 4 causes the displacement
    20 corresponding in the same direction of the first bar 5 and, therefore, of the joint 7. As already described above, the sample holder 8 is articulated to the second bar 6 through the joint 9 and is articulated to the base element 10 through the articulation 11. In this way, the described displacement of the articulation 7 will make the second bar 6 articulated thereto and the
    25 sample holder 8 begins to swing around the joint 7, since the relative position of the joint 11 of the sample holder 8 to the base element 10 is fixed in the direction of the X axis and the first rod 5 is integral with respect to to nut element 4. The tilting of the second bar 6 (clockwise in Figure 2b) will cause the sample holder 8 to begin to swing around the
    30 articulation 11 also clockwise.
    The more the manipulator 2 is rotated and, therefore, the threaded shaft 1, in the same direction, the greater the longitudinal displacement of the nut element 4 and the first bar 5 and, therefore, the greater the angle which will swing the support 8
    35 samples with respect to the X axis.


    Obviously, to return the sample holder 8 in the position of Figure 2a, it will only be necessary to rotate the manipulator 2 in the opposite direction until the desired position is obtained.
    5 Figure 5 shows the device of the present invention mounted in a sample analysis facility in a vacuum environment, for example, in a synchrotron. The sample holder 8 is arranged in a straight position (0 ° with respect to the X axis) inside a vacuum chamber after having passed through the annular part 12 attached to the synchrotron body. also can
    10 observing part of the manipulator 2 used to insert the device into the vacuum chamber and to change the inclination of the sample holder 8 from the outside of said chamber.
    Thanks to the device of the present invention, it is possible to change the orientation of the
    15 support 8 of samples within the vacuum chamber only by rotating the manipulator 2 around the X axis from the outside, as described above, so that each support S containing the corresponding sample will be oriented in the most appropriate manner to collect said sample and dispose of it in its definitive test location, being possible to eliminate devices
    Intermediate transfer 20 which, if there is no possibility of orienting the support 8, would be necessary to carry out said function.
    The device of the present invention does not require the use of double shafts or complicated mechanisms to change the orientation of the sample holder 8
    25 inside the vacuum chamber.
    The range of angles that the sample holder 8 can rotate around the joint 11 with respect to the X axis can vary from 0 to 90 °.
    All components of the device of the invention will preferably be made of compatible materials for use in vacuum environments (high vacuum and / or ultra high vacuum).

    权利要求:
    Claims (4)
    [1]
    1. Sample support device in vacuum environments comprising a sample support element (8) associated with a device (2) 5 for handling said sample support element (8), characterized in that it comprises furthermore a threaded shaft (1) that includes means (1a, 3) for fixing to the manipulation device (2) at one end (1a); a base element (10) fixed to the opposite end (1b) of the threaded shaft (1) so that the threaded shaft (1) can freely rotate about its longitudinal axis (X) with respect to said element (10) of base; a nut element (4) screwed into the threaded shaft (1) and movable along it by screwing; a connection element (5, 6) associated to the nut element (4) and associated to the sample support element (8), the sample support element (8) being articulated to said connection element (5, 6) by means of a first articulation (9) and said base element being articulated (10) by means of a second articulation (11), the articulation axes of the first and second articulations (9, 11) being parallel to each other and perpendicular with with respect to the longitudinal axis (X) of the threaded shaft (1); and support means (12) that can be fixed to an external support and that comprise a support surface (14) for a part (5) of the group formed by
    20 the nut element (4), the connection means (5, 6), the base element (10) and the sample support element (8).
    [2]
    2. Device according to claim 1, characterized in that the connecting element comprises a first bar (5) fixedly connected
    25 at one end to the nut element (4) and a second bar (6) articulated at one end to the other end of the first bar (5) and articulated at its other end to the sample support element (8) through the first joint (9), the articulation axes of the joint (7) being between the first and second bars (5, 6) and the first joint (9) parallel to each other.
    [3]
    Device according to claim 2, characterized in that the support means comprise a part (12) that includes means for fixing to an external support and an opening (13) therethrough for the passage of the element ( 8) sample holder, said opening (13) comprising a
    35 support surface (14) for the first bar (5) with a complementary shape with respect to the outer contour of a part of said first bar (5).

    [4]
    Device according to any of the preceding claims, characterized in that the sample support element (8) comprises a plurality of modular compartments (8a) for corresponding samples.


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